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Micro/Nano Scale Amorphization of Silicon by Femtosecond Laser Irradiation

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posted on 21.05.2021, 16:31 authored by Amirkianoosh Kiani, Krishnan Venkatakrishnan, Bo Tan
Micro/Nano Scale Amorphization of Silicon by Femtosecond Laser Irradiation

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eng

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Micro/Nano Scale Amorphization of Silicon by Femtosecond Laser Irradiation
Aerospace EngineeringAerospace Engineering

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PhotolithographyAmorphous substancesFemtosecond lasers

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CC BY-NC-ND 4.0

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