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Measurement of the properties of MetalMUMPS® thin films

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posted on 22.05.2021, 08:40 by John Shih-Hua Chang
The metal multi-user micro-electro-mechanical-systems (MEMS) processes (MetalMUMPs®) micro-machining process includes two silicon nitride films, one polysilicon film, and one nickel film for constructing various MEMS devices. This thesis presents property measurements of the metalMUMPs® silicon nitride and nickel films. Fabricated MetalMUMPs® silicon nutride prototypes were used to experimentally determine a Young’s modulus of 209 GPa and a residual stress difference of 169 MPa for the silicon nitride films. A method, which uses the deformations along the width of bi-layered cantilever beams, was proposed to determine the residual stress difference of the two silicon nitride films. Fabricated MetalMUMPs® nickel prototypes were used to experimentally extract a Young’s modulus of 159 GPa and a residual stress gradient of -4.72 MPa/m for the nickel film. A micro bridge mechanism was developed to lift long silicon nitride beams for the determination of the residual stress difference of the two silicon nitride films.

History

Language

eng

Degree

Master of Applied Science

Program

Mechanical and Industrial Engineering

Granting Institution

Ryerson University

LAC Thesis Type

Thesis

Thesis Advisor

Siyuan He

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Mechanical and Industrial Engineering (Theses)

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